Enhanced thermal dissipation for BCB-bonded 3D integrated membrane photonic circuits
Indium–phosphide membrane on silicon is a nanophotonics platform which allows for monolithic integration of sub-micron nanophotonic waveguide circuits with native and efficient amplifiers and lasers. Active devices such as amplifiers have a high topography that requires a thick dielectric layer for...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
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| Series: | JPhys Photonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2515-7647/adaf63 |
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| Summary: | Indium–phosphide membrane on silicon is a nanophotonics platform which allows for monolithic integration of sub-micron nanophotonic waveguide circuits with native and efficient amplifiers and lasers. Active devices such as amplifiers have a high topography that requires a thick dielectric layer for planarization and wafer bonding, which poses challenges in thermal dissipation. Herein, we comprehensively analyzed the performance of distributed feedback lasers (DFBs) bonded on Si using a 2 µ m-thick benzocyclobutene (BCB) layer, and with and without a 5 µ m-thick gold thermal shunt to the substrate for efficient thermal dissipation. The thermal resistance of shunted devices is 176 and 115 K W ^−1 for 0.5 mm and 0.75 mm lengths, respectively, which is a 2× improvement compared to reference membrane devices with no thermal shunt. This thermal resistance is maintained across various BCB thicknesses up to 30 µ m, ensuring the possibility of using such devices for scalable 3D integration on other platforms or with electronics. Moreover, we showed that the thermal resistance value is around 110–120 K W ^−1 for 0.75 mm-long shunted DFBs having array density values in the range of 40–200 µ m, and that the temperature rise at the end of the DFB contact is as low as 1.3 °C at 8 kA cm ^−2 driving current. Both of these characteristics demonstrate the density scaling potential of these nanophotonic devices. |
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| ISSN: | 2515-7647 |