Enhanced thermal dissipation for BCB-bonded 3D integrated membrane photonic circuits
Indium–phosphide membrane on silicon is a nanophotonics platform which allows for monolithic integration of sub-micron nanophotonic waveguide circuits with native and efficient amplifiers and lasers. Active devices such as amplifiers have a high topography that requires a thick dielectric layer for...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
|
| Series: | JPhys Photonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2515-7647/adaf63 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|