High-precision multi-focus laser sculpting of microstructured glass
Precision sculpting of glass with defined surface microstructures is vital due to the miniaturization and integration of glass-based devices, while it is still challenging as the high brittleness of glass. We here create a three-dimensional multi-focus laser for glass micro-sculpting through a beam-...
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Main Authors: | , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Institue of Optics and Electronics, Chinese Academy of Sciences
2024-11-01
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Series: | Opto-Electronic Advances |
Subjects: | |
Online Access: | https://www.oejournal.org/article/doi/10.29026/oea.2024.240082 |
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