High-precision multi-focus laser sculpting of microstructured glass

Precision sculpting of glass with defined surface microstructures is vital due to the miniaturization and integration of glass-based devices, while it is still challenging as the high brittleness of glass. We here create a three-dimensional multi-focus laser for glass micro-sculpting through a beam-...

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Bibliographic Details
Main Authors: Kang Xu, Peilin Huang, Lingyu Huang, Li Yao, Zongyao Li, Jiantao Chen, Li Zhang, Shaolin Xu
Format: Article
Language:English
Published: Institue of Optics and Electronics, Chinese Academy of Sciences 2024-11-01
Series:Opto-Electronic Advances
Subjects:
Online Access:https://www.oejournal.org/article/doi/10.29026/oea.2024.240082
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