Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films

Temperature Dependence on Microstructure, Crystallization Orientation, and Piezoelectric Properties of ZnO Films

This study has investigated the effects of different annealing temperatures on the microstructure, chemical composition, phase structure, and piezoelectric properties of ZnO films. The analysis focuses on how annealing temperature influences the oxygen content and the preferred c-axis (002) orientat...

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Bibliographic Details
Main Authors: Ke Deng, Zhonghao Liu, Hulin Liu, Yanxiang Chen, Shang Li, Shuren Guo, Boyu Xiu, Xuanpu Dong, Huatang Cao
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Sensors
Subjects:
ZnO films
annealing treatment
microstructure
piezoelectric
sensors
Online Access:https://www.mdpi.com/1424-8220/25/1/242
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