Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits
Sapphire substrates have recently been recognized for their potential to improve the coherence time of superconducting qubits. However, due to challenges in via fabrication, silicon substrates have been predominantly used for qubits. In this study, we fabricated vias on sapphire substrates using las...
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| Format: | Article |
| Language: | English |
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IEEE
2024-01-01
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| Series: | IEEE Transactions on Quantum Engineering |
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| Online Access: | https://ieeexplore.ieee.org/document/10566011/ |
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| author | Kiyotaka Mukasa Yusuke Nuruki Hayato Kubo Yoshihide Narahara Motohiro Umehara Kazuyuki Fujie |
| author_facet | Kiyotaka Mukasa Yusuke Nuruki Hayato Kubo Yoshihide Narahara Motohiro Umehara Kazuyuki Fujie |
| author_sort | Kiyotaka Mukasa |
| collection | DOAJ |
| description | Sapphire substrates have recently been recognized for their potential to improve the coherence time of superconducting qubits. However, due to challenges in via fabrication, silicon substrates have been predominantly used for qubits. In this study, we fabricated vias on sapphire substrates using lasers and deposited TiN films by chemical vapor deposition. Cross-sectional views of the via confirmed uniform thickness of the TiN film along the via wall. In addition, the TiN film exhibited a superconducting transition at 4.5 K, demonstrating the successful deposition of a high-quality homogeneous superconducting film. This represents the first example of realizing superconducting through-substrate vias on sapphire substrates, a crucial first step toward achieving the 3-D integration of qubits while maintaining coherence time. |
| format | Article |
| id | doaj-art-f57436eec1614becab56e9b61e282bfe |
| institution | Kabale University |
| issn | 2689-1808 |
| language | English |
| publishDate | 2024-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Transactions on Quantum Engineering |
| spelling | doaj-art-f57436eec1614becab56e9b61e282bfe2025-01-28T00:02:27ZengIEEEIEEE Transactions on Quantum Engineering2689-18082024-01-0151410.1109/TQE.2024.341696310566011Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum CircuitsKiyotaka Mukasa0https://orcid.org/0000-0003-1654-1488Yusuke Nuruki1Hayato Kubo2https://orcid.org/0009-0000-7892-4973Yoshihide Narahara3Motohiro Umehara4Kazuyuki Fujie5https://orcid.org/0000-0003-0736-7553Corporate R&D Group, Kyocera Corporation, Kyoto, JapanIndustrial Tool Group, Kyocera Corporation, Kagoshima, JapanIndustrial Tool Group, Kyocera Corporation, Kagoshima, JapanFine Ceramics Group, Kyocera Corporation, Shiga, JapanFine Ceramics Group, Kyocera Corporation, Shiga, JapanCorporate R&D Group, Kyocera Corporation, Kyoto, JapanSapphire substrates have recently been recognized for their potential to improve the coherence time of superconducting qubits. However, due to challenges in via fabrication, silicon substrates have been predominantly used for qubits. In this study, we fabricated vias on sapphire substrates using lasers and deposited TiN films by chemical vapor deposition. Cross-sectional views of the via confirmed uniform thickness of the TiN film along the via wall. In addition, the TiN film exhibited a superconducting transition at 4.5 K, demonstrating the successful deposition of a high-quality homogeneous superconducting film. This represents the first example of realizing superconducting through-substrate vias on sapphire substrates, a crucial first step toward achieving the 3-D integration of qubits while maintaining coherence time.https://ieeexplore.ieee.org/document/10566011/Sapphire substratessuperconducting qubitsthrough-substrate viastitanium nitride (TiN) |
| spellingShingle | Kiyotaka Mukasa Yusuke Nuruki Hayato Kubo Yoshihide Narahara Motohiro Umehara Kazuyuki Fujie Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits IEEE Transactions on Quantum Engineering Sapphire substrates superconducting qubits through-substrate vias titanium nitride (TiN) |
| title | Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits |
| title_full | Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits |
| title_fullStr | Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits |
| title_full_unstemmed | Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits |
| title_short | Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits |
| title_sort | superconducting through substrate vias on sapphire substrates for quantum circuits |
| topic | Sapphire substrates superconducting qubits through-substrate vias titanium nitride (TiN) |
| url | https://ieeexplore.ieee.org/document/10566011/ |
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