Superconducting Through-Substrate Vias on Sapphire Substrates for Quantum Circuits
Sapphire substrates have recently been recognized for their potential to improve the coherence time of superconducting qubits. However, due to challenges in via fabrication, silicon substrates have been predominantly used for qubits. In this study, we fabricated vias on sapphire substrates using las...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2024-01-01
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| Series: | IEEE Transactions on Quantum Engineering |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/10566011/ |
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