Full Cross-Sectional Profile Measurement of a High-Aspect-Ratio Micro-Groove Using a Deflection Probe Measuring System
For the full cross-sectional profile measurement of high-aspect-ratio micro-grooves, traditional measurement methods have blind measurement areas in the vertical sidewall and its intersection area with the bottom. This paper proposes a deflection-based scanning method that utilizes a large length-to...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/25/7/2335 |
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