Surface Electric Potential Measurement with a Static Probe

Surface Electric Potential Measurement with a Static Probe

Surface electric potential measurements are widely used in non-destructive inspection and testing of precision surfaces, for example, in the production of semiconductor devices and integrated circuits. Features of the construction and application of devices for measuring the surface electric potenti...

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Bibliographic Details
Main Authors: R. I. Vorobey, O. K. Gusev, A. I. Zharin, V. A. Mikitsevich, K. U. Pantsialeyeu, A. V. Samarina, A. I. Svistun, A. K. Tyavlovsky, K. L. Tyavlovsky
Format: Article
Language:English
Published: Belarusian National Technical University 2023-08-01
Series:Приборы и методы измерений
Subjects:
surface electric potential
surface photovoltage
kelvin probe technique
two-capacitor technique
static probe
Online Access:https://pimi.bntu.by/jour/article/view/825
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