Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity

Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity

A wafer-scale process for fabricating monolithically suspended nano-perforated membranes (NPMs) with integrated support structures into silicon is developed. Existing fabrication methods are suitable for many desired geometries, but face challenges related to mechanical robustness and fabrication co...

Full description

Saved in:

Bibliographic Details
Main Authors:	Sanjeev Vishal Kota, Anil Thilsted, Daniel Trimarco, Jesper Yue Pan, Ole Hansen, Jörg Hübner, Rafael Taboryski, Henri Jansen
Format:	Article
Language:	English
Published:	MDPI AG 2025-01-01
Series:	Micromachines
Subjects:	monolithic buried cavity perforated membrane silicon nanofabrication nano-pores DREM
Online Access:	https://www.mdpi.com/2072-666X/16/1/104
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

HPLC method with monolithic column for simultaneous determination of irbesartan and hydrochlorothiazide in tablets
by: Alanazi Amer M., et al.
Published: (2014-06-01)

Cost Analysis of Running Web Application in Cloud Monolith, Microservice and Serverless Architecture
by: Muhammad Uzair Nadeem, et al.
Published: (2024-12-01)

A Simple Technique to Locate the Nail Tip in a Buried Interlocking Nail in Femur while Extraction
by: Mugundhan Moongilpatti Sengodan, et al.
Published: (2024-06-01)

Study on the vibration characteristics and influence range of buried dam pipeline
by: Lihui Gao, et al.
Published: (2025-01-01)

Comparing monolithic and fused core HPLC columns for fast chromatographic analysis of fat-soluble vitamins
by: Kurdi Said El, et al.
Published: (2017-06-01)

ASSESSING THE QUALITY OF MICROSERVICE AND MONOLITHIC-BASED ARCHITECTURES: A SYSTEMATIC LITERATURE REVIEW
by: Saad Hussein, et al.
Published: (2024-06-01)

Drugs as a cause of perforating dermatoses – a literature review
by: Lidia Mądrzak, et al.
Published: (2024-11-01)

Measurement of dynamic characteristics of a steel-spring floating slab track and a monolithic roadbed track in a subway tunnel
by: Yongjian Zhou, et al.
Published: (2025-01-01)

Ecological restoration in valley area of semiarid region damaged by shallow buried coal seam mining
by: Chen Puhao, et al.
Published: (2025-02-01)

Pressure Reduction Effects of Compressible Materials on the Buried Pipes Subjected to Large Surcharges
by: Marcin Kochanowicz, et al.
Published: (2023-06-01)

Modelling biosensors with perforated membrane
by: Romas Baronas, et al.
Published: (2005-12-01)

Perforated Meckel diverticulitis: Diagnostic challenges and surgical outcomes
by: Imen Ben Ismail, MD, et al.
Published: (2025-03-01)

Wafer-Scale Monolithic Integration of LEDs with p-GaN-Depletion MOSFETs on a GaN LED Epitaxial Layer
by: Boseong Son, et al.
Published: (2024-01-01)

Robust Wiener filter‐based time gating method for detection of shallowly buried objects
by: Ali Gharamohammadi, et al.
Published: (2021-02-01)

Active phase compensation technique for buried target extraction
by: Y.‐S. Cho, et al.
Published: (2017-03-01)

“Pure Fat Flap”—Perforator-based Adiposal Layer Only Flap for Lateral Ankle Reconstruction
by: Seok Joon Lee, et al.
Published: (2025-01-01)

Precursor sticking coefficient determination from indented deposits fabricated by electron beam induced deposition
by: Alexander Kuprava, et al.
Published: (2025-01-01)

Green synthesis of TiO2 nanoparticles prepared from Phyllanthus niruri leaf extract for dye adsorption and their isotherm and kinetic studies
by: Anitha Panneerselvam, et al.
Published: (2021-04-01)

Evaluation of column studies using Cynodon dactylon plant‐mediated amino‐grouped silica‐layered magnetic nanoadsorbent to remove noxious hexavalent chromium metal ions
by: Dhanya Vishnu, et al.
Published: (2021-06-01)

Use of indocyanine green to assess integrity of the gastric wall after repairing the gastric perforation
by: Guoteng Qiu, et al.
Published: (2025-02-01)

Classification of Buried Objects From Ground Penetrating Radar Images by Using Second-Order Deep Learning Models
by: Douba Jafuno, et al.
Published: (2025-01-01)

A VERY LOW BANDGAP LINE-TUNNEL FIELD EFFECT TRANSISTOR WITH CHANNEL-BURIED OXIDE AND LATERALLY DOPED POCKET
by: Huu Thai Bui, et al.
Published: (2024-09-01)

Statistical approach to synthesise biogenic silica nanoparticles from rice husk and conjugated with Justicia adhatoda extract as green, slow‐release biocide
by: Peerzada Gh Jeelani, et al.
Published: (2021-06-01)

New insight into the controlling factors of differences in carbonate buried-hills driven by tectonic activity: a case study of the Weixinan Sag, Beibuwan Basin, China
by: Yanying Li, et al.
Published: (2025-01-01)

Three-dimensional discrete element analysis of the excavation face stability of deep-buried shield tunnels
by: Xin Huang, et al.
Published: (2025-02-01)

ASYNCHRONOUS MOTOR WITH A HOLLOW PERFORATED ROTOR
by: A. N. Annenkov, et al.
Published: (2018-04-01)

Hydraulic fracture propagation characteristics of directional perforation fracturing in horizontal wells for deep coalbed methane
by: Shuxin HUANG, et al.
Published: (2025-01-01)

The Efficacy of Platelet-Rich Plasma in the Repair of Tympanic Membrane Perforation
by: Kudure Basavaraj Prashanth, et al.
Published: (2025-01-01)

Giant trochanteric pressure sore: Use of a pedicled chimeric perforator flap for cover
by: Sandeep Mehrotra
Published: (2009-02-01)

Six Cases of the Medial Sural Artery Perforator Flap
by: Kaoru Kuwabara, et al.
Published: (2025-01-01)

THE IMAGE OF HORROR AS VIEWED IN EDGAR ALLAN POE'S THREE SHORT STORIES (LIGEA, THE BLACK CAT, THE FALL OF USERS)
by: Endang Eko Djati Setiawati, et al.
Published: (2019-03-01)

Loop underlay tympanoplasty for anterior, subtotal and total tympanic membrane perforations: a retrospective review
by: Rana Barake, et al.
Published: (2019-03-01)

Evaluation of the Marginal Fit of Full Contoured Zirconia, Lithium Disilicate and Metal Crowns Fabricated Using CAD-CAM: An in Vitro Study
by: Savitha Dandekeri, et al.
Published: (2023-04-01)

Postpartum choriocarcinoma complicated by uterine perforation: A case report and literature review
by: Rayan R. Salahaldin, et al.
Published: (2025-03-01)

Blood clots affect the response of tympanic membrane perforations to gelfoam grafting after ventilation tube insertion
by: Zhengcai Lou
Published: (2021-01-01)

Optimisation of food grade mixed surfactant‐based l‐ascorbic acid nanoemulsions using response surface methodology
by: Tahir Mehmood
Published: (2021-05-01)

Cardiac Tamponade Due to Right Ventricle Perforation: A Rare Complication of Catheter Ablation for Ventricular Tachycardia Storm
by: Annisa Puspitasari Nachrowi, et al.
Published: (2024-10-01)

Appendiceal Perforation and Abdominal Wall Infection Caused by Invasive Mucormycosis in a Child with Acute Leukemia
by: Li C, et al.
Published: (2025-01-01)

Comparison of Graft Uptake in Perforated Eardrums with and without Myringosclerosis: A Prospective Case-control Study in a Tertiary Centre
by: Ayaz Rehman, et al.
Published: (2025-01-01)

A Cadaveric Study of the Anatomical Characteristics of the Superficial Circumflex Iliac Artery Perforator
by: Tanvi Rao, et al.