Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity

Nano-Perforated Silicon Membrane with Monolithically Integrated Buried Cavity

A wafer-scale process for fabricating monolithically suspended nano-perforated membranes (NPMs) with integrated support structures into silicon is developed. Existing fabrication methods are suitable for many desired geometries, but face challenges related to mechanical robustness and fabrication co...

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Bibliographic Details
Main Authors: Sanjeev Vishal Kota, Anil Thilsted, Daniel Trimarco, Jesper Yue Pan, Ole Hansen, Jörg Hübner, Rafael Taboryski, Henri Jansen
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Micromachines
Subjects:
monolithic
buried cavity
perforated membrane
silicon nanofabrication
nano-pores
DREM
Online Access:https://www.mdpi.com/2072-666X/16/1/104
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https://www.mdpi.com/2072-666X/16/1/104

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