Phase Response Identification of Photodetectors in High-Speed Interferometry Using Photoelectric Pseudorandom Signals

Dynamic accuracy and synchronization of high-speed interferometry are crucial for advanced manufacturing, semiconductor fabrication, and dynamic metrology, where asynchronous errors introduced by the nonlinear phase responses of photodetectors can severely degrade the measurement performance. The co...

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Bibliographic Details
Main Authors: Yunke Sun, Yifei Xie, Xiaotong Yan, Xu Xing, Pengcheng Hu
Format: Article
Language:English
Published: IEEE 2025-01-01
Series:IEEE Photonics Journal
Subjects:
Online Access:https://ieeexplore.ieee.org/document/11034693/
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