Simulation Study of Low-Dose 4D-STEM Phase Contrast Techniques at the Nanoscale in SEM

Phase contrast imaging is well-suited for studying weakly scattering samples. Its strength lies in its ability to measure how the phase of the electron beam is affected by the sample, even when other imaging techniques yield low contrast. In this study, we explore via simulations two phase contrast...

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Bibliographic Details
Main Authors: Zvonimír Jílek, Tomáš Radlička, Vladislav Krzyžánek
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/15/1/70
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