Study and Characterization of Silicon Nitride Optical Waveguide Coupling with a Quartz Tuning Fork for the Development of Integrated Sensing Platforms
This work demonstrates an ultra-compact optical gas-sensing system, consisting of a pigtailed laser diode emitting at 1392.5 nm for water vapor (H<sub>2</sub>O) detection, a silicon nitride (Si<sub>3</sub>N<sub>4</sub>) optical waveguide to guide the laser light,...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/25/12/3663 |
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