A 70 MPa silicon resonant pressure microsensor with resonators supported by micro beams based on volume compressed sensing
Abstract Meeting the growing demands for accuracy, resolution and response time of high-pressure microsensors applicated in ocean science and petroleum industry, this paper developed a silicon resonant high pressure microsensor based on volume compressed sensing with dual resonators supported by mic...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-06-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00957-9 |
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