Three-dimensional direct lithography of stable quantum dots in hybrid glass
Semiconductor quantum dots (QDs), as high-performance materials, play an essential role in contemporary industry, mainly due to their high photoluminescent quantum yield, wide absorption characteristics, and size-dependent light emission. It is essential to construct well-defined micro-/nano- struct...
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| Format: | Article |
| Language: | English |
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IOP Publishing
2025-01-01
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| Series: | International Journal of Extreme Manufacturing |
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| Online Access: | https://doi.org/10.1088/2631-7990/adaab1 |
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| author | Dezhi Zhu Shangben Jiang Ying Wang Dejun Liu Weijia Bao Liwei Liu Junle Qu Yiping Wang Changrui Liao |
| author_facet | Dezhi Zhu Shangben Jiang Ying Wang Dejun Liu Weijia Bao Liwei Liu Junle Qu Yiping Wang Changrui Liao |
| author_sort | Dezhi Zhu |
| collection | DOAJ |
| description | Semiconductor quantum dots (QDs), as high-performance materials, play an essential role in contemporary industry, mainly due to their high photoluminescent quantum yield, wide absorption characteristics, and size-dependent light emission. It is essential to construct well-defined micro-/nano- structures using QDs as building blocks for micro-optic applications. However, the fabrication of stable QDs with designed functional structures has long been challenging. Here, we propose a strategy for three-dimensional direct lithography of desired QDs within a hybrid medium with specific protection properties. The acrylate-functionalized hybrid precursors enable local crosslinking through ultrafast laser-induced multiphoton absorption, achieving sub-100 nm resolution surpassing the diffraction limit. The printed micro-/nano- structures possess thermal stability up to 600 °C, which can be transformed to inorganic architectures with a volume shrinkage. Due to the encapsulated QDs within the densely silicon-oxygen molecular networks, the functional structures demonstrate good stability against ultraviolet irradiation, corrosive solutions, and elevated temperatures. Based on hybrid 3D nanolithography, bicolor multilayer micro-/nano- structures are manufactured for applications in 3D data storage and optical information encryption. This research presents an effective strategy for the fabrication of desired QD micro-/nano- structures, supporting the development of stable functional device applications. |
| format | Article |
| id | doaj-art-e08c0a5e6d9846f7be03bf7e7e58db18 |
| institution | Kabale University |
| issn | 2631-7990 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | International Journal of Extreme Manufacturing |
| spelling | doaj-art-e08c0a5e6d9846f7be03bf7e7e58db182025-01-29T09:51:30ZengIOP PublishingInternational Journal of Extreme Manufacturing2631-79902025-01-017303550310.1088/2631-7990/adaab1Three-dimensional direct lithography of stable quantum dots in hybrid glassDezhi Zhu0Shangben Jiang1Ying Wang2Dejun Liu3Weijia Bao4Liwei Liu5Junle Qu6Yiping Wang7Changrui Liao8https://orcid.org/0000-0003-3669-5054Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University , Shenzhen 518060, People’s Republic of China; Guangdong Laboratory of Artificial Intelligence and Digital Economy (SZ) , Shenzhen 518060, People’s Republic of China; Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fiber Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University , Shenzhen 518060, People’s Republic of ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University , Shenzhen 518060, People’s Republic of China; Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fiber Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University , Shenzhen 518060, People’s Republic of ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University , Shenzhen 518060, People’s Republic of China; Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fiber Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University , Shenzhen 518060, People’s Republic of ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University , Shenzhen 518060, People’s Republic of China; Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fiber Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University , Shenzhen 518060, People’s Republic of ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University , Shenzhen 518060, People’s Republic of China; Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fiber Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University , Shenzhen 518060, People’s Republic of ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University , Shenzhen 518060, People’s Republic of ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University , Shenzhen 518060, People’s Republic of ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University , Shenzhen 518060, People’s Republic of China; Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fiber Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University , Shenzhen 518060, People’s Republic of ChinaShenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University , Shenzhen 518060, People’s Republic of China; Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fiber Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University , Shenzhen 518060, People’s Republic of ChinaSemiconductor quantum dots (QDs), as high-performance materials, play an essential role in contemporary industry, mainly due to their high photoluminescent quantum yield, wide absorption characteristics, and size-dependent light emission. It is essential to construct well-defined micro-/nano- structures using QDs as building blocks for micro-optic applications. However, the fabrication of stable QDs with designed functional structures has long been challenging. Here, we propose a strategy for three-dimensional direct lithography of desired QDs within a hybrid medium with specific protection properties. The acrylate-functionalized hybrid precursors enable local crosslinking through ultrafast laser-induced multiphoton absorption, achieving sub-100 nm resolution surpassing the diffraction limit. The printed micro-/nano- structures possess thermal stability up to 600 °C, which can be transformed to inorganic architectures with a volume shrinkage. Due to the encapsulated QDs within the densely silicon-oxygen molecular networks, the functional structures demonstrate good stability against ultraviolet irradiation, corrosive solutions, and elevated temperatures. Based on hybrid 3D nanolithography, bicolor multilayer micro-/nano- structures are manufactured for applications in 3D data storage and optical information encryption. This research presents an effective strategy for the fabrication of desired QD micro-/nano- structures, supporting the development of stable functional device applications.https://doi.org/10.1088/2631-7990/adaab1ultrafast lasermultiphoton absorptionnanolithographystable QDs |
| spellingShingle | Dezhi Zhu Shangben Jiang Ying Wang Dejun Liu Weijia Bao Liwei Liu Junle Qu Yiping Wang Changrui Liao Three-dimensional direct lithography of stable quantum dots in hybrid glass International Journal of Extreme Manufacturing ultrafast laser multiphoton absorption nanolithography stable QDs |
| title | Three-dimensional direct lithography of stable quantum dots in hybrid glass |
| title_full | Three-dimensional direct lithography of stable quantum dots in hybrid glass |
| title_fullStr | Three-dimensional direct lithography of stable quantum dots in hybrid glass |
| title_full_unstemmed | Three-dimensional direct lithography of stable quantum dots in hybrid glass |
| title_short | Three-dimensional direct lithography of stable quantum dots in hybrid glass |
| title_sort | three dimensional direct lithography of stable quantum dots in hybrid glass |
| topic | ultrafast laser multiphoton absorption nanolithography stable QDs |
| url | https://doi.org/10.1088/2631-7990/adaab1 |
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