Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors
This paper mainly concentrates on finding maximum displacement and Eigen frequency for microelectromechanical system (MEMS) inertial sensors with various beam structures. In this work, six different shapes of beams are attached with one set of electrodes to find which structure exhibits the maximum...
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| Format: | Article |
| Language: | English |
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Wiley
2022-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2022/3081473 |
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| author | Mohammad Taj Telagathoti Pitchaiah Bashyam Sasikumar |
| author_facet | Mohammad Taj Telagathoti Pitchaiah Bashyam Sasikumar |
| author_sort | Mohammad Taj |
| collection | DOAJ |
| description | This paper mainly concentrates on finding maximum displacement and Eigen frequency for microelectromechanical system (MEMS) inertial sensors with various beam structures. In this work, six different shapes of beams are attached with one set of electrodes to find which structure exhibits the maximum displacement with less cross-axis displacement and to observe the operating frequency. The momentum of the beams is directly proportional to the thickness and length, which provides the maximum flexibility to produce momentum on proof mass. The beam thickness is 5 um for all proposed sensors and the momentum has been observed by changing different shapes of beam structures. The momentum occurred on proof mass due to applied physical energy. The same amount of physical energy is applied to all structure and the momentum, quality factor, and displacement are measured which had been compared and the table is given. |
| format | Article |
| id | doaj-art-dbc07783b3ff4aa7ad005d18cb07a4e2 |
| institution | Kabale University |
| issn | 1687-8442 |
| language | English |
| publishDate | 2022-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-dbc07783b3ff4aa7ad005d18cb07a4e22025-02-03T05:53:50ZengWileyAdvances in Materials Science and Engineering1687-84422022-01-01202210.1155/2022/3081473Design and Simulation of Silicon-Based Suspension Beams for Various MEMS SensorsMohammad Taj0Telagathoti Pitchaiah1Bashyam Sasikumar2Department of Electronics and Communication EngineeringDepartment of Electronics and Communication EngineeringFaculty of Mechanical EngineeringThis paper mainly concentrates on finding maximum displacement and Eigen frequency for microelectromechanical system (MEMS) inertial sensors with various beam structures. In this work, six different shapes of beams are attached with one set of electrodes to find which structure exhibits the maximum displacement with less cross-axis displacement and to observe the operating frequency. The momentum of the beams is directly proportional to the thickness and length, which provides the maximum flexibility to produce momentum on proof mass. The beam thickness is 5 um for all proposed sensors and the momentum has been observed by changing different shapes of beam structures. The momentum occurred on proof mass due to applied physical energy. The same amount of physical energy is applied to all structure and the momentum, quality factor, and displacement are measured which had been compared and the table is given.http://dx.doi.org/10.1155/2022/3081473 |
| spellingShingle | Mohammad Taj Telagathoti Pitchaiah Bashyam Sasikumar Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors Advances in Materials Science and Engineering |
| title | Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors |
| title_full | Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors |
| title_fullStr | Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors |
| title_full_unstemmed | Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors |
| title_short | Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors |
| title_sort | design and simulation of silicon based suspension beams for various mems sensors |
| url | http://dx.doi.org/10.1155/2022/3081473 |
| work_keys_str_mv | AT mohammadtaj designandsimulationofsiliconbasedsuspensionbeamsforvariousmemssensors AT telagathotipitchaiah designandsimulationofsiliconbasedsuspensionbeamsforvariousmemssensors AT bashyamsasikumar designandsimulationofsiliconbasedsuspensionbeamsforvariousmemssensors |