Design and Simulation of Silicon-Based Suspension Beams for Various MEMS Sensors
This paper mainly concentrates on finding maximum displacement and Eigen frequency for microelectromechanical system (MEMS) inertial sensors with various beam structures. In this work, six different shapes of beams are attached with one set of electrodes to find which structure exhibits the maximum...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2022/3081473 |
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