Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance

Modeling Dual-SiO<sub>x</sub>N Thin-Film Edge Coupler with Ultra-Low Loss and Large Alignment Tolerance

High-performance facet couplers are essential components in the field of silicon nitride integrated photonic chips. In this work, a novel end-face coupling structure, using a double-layer SiO<sub>x</sub>N thin-film waveguide, is proposed. By precisely controlling the thickness and gap of...

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Bibliographic Details
Main Authors: Zhaozhen Chen, Xin Fu, Lei Zhang, Zhengsheng Han
Format: Article
Language:English
Published: MDPI AG 2025-02-01
Series:Photonics
Subjects:
edge couplers
silicon photonics
silicon nitride
silicon oxynitride
Online Access:https://www.mdpi.com/2304-6732/12/2/136
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