Fabrication of Hollow Needle Tips with Nanoholes by Plasma Maskless Processing and Calculation and Detection of Complex Surface Edges
The plasma maskless processing method combines the advantages of plasma etching and scanning probe processing, such as high etching efficiency, wide range of applicable materials, and high resolution. This method is based on the probe driving and detection of piezoelectric thin films, which enables...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2022/1113658 |
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