Eliminating nanometer-scale asperities on metallic thin films through plasma modification processes studied by molecular dynamics and AFM

Eliminating nanometer-scale asperities on metallic thin films through plasma modification processes studied by molecular dynamics and AFM

Abstract We report the effects of reducing surface asperity size at the nanometer scale on metallic surfaces by plasma-assisted surface modification processes using simulations and experiments. Molecular dynamics (MD) simulations were conducted by irradiating various inert gas ions (Ne, Ar, Kr, and...

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Main Authors: Tomoyuki Tsuyama, Tatsuki Oyama, Yu Azuma, Haruhisa Ohashi, Masahiro Irie, Ayumi Yamakawa, Shoko Uetake, Takayuki Konno, Takahiro Ukai, Kohei Ochiai, Nobuyuki Iwaoka, Atsushi Hashimoto, Yoshishige Okuno
Format: Article
Language:English
Published: Nature Portfolio 2025-04-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-025-92095-5
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https://doi.org/10.1038/s41598-025-92095-5

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