Understanding Hydrogen Passivation Mechanism in poly-Si Passivating Contacts via SixNy Composition: Insights From Effusion Studies

Understanding Hydrogen Passivation Mechanism in poly-Si Passivating Contacts via SixNy Composition: Insights From Effusion Studies

Tunnel Oxide Passivated Contact (TOPCon) cell performance relies significantly on hydrogen for its passivation of defects. In this paper, we discuss the temperature dependent effusion of hydrogen from the silicon nitride (SixNy) layers deposited on top of poly-Si/SiO2 passivated contacts. Silicon c...

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Bibliographic Details
Main Authors: Suchismita Mitra, Dirk Steyn, William Nemeth, Sumit Agarwal, Paul Stradins
Format: Article
Language:English
Published: TIB Open Publishing 2025-01-01
Series:SiliconPV Conference Proceedings
Subjects:
TOPCON Cells
Hydrogen Effusion
Defect Passivation
Silicon Nitride Layers
Aluminium Oxide Layers
Online Access:https://www.tib-op.org/ojs/index.php/siliconpv/article/view/1312
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https://www.tib-op.org/ojs/index.php/siliconpv/article/view/1312

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