Application of Compound Control Method Based on WOA in Micropositioning Stage of SICM
Positioning accuracy of micropositioning stage in scanning ion conductance microscopy is the key to obtain high-precision scanning model. Most piezoelectric ceramic micromotion platforms are used for that, and hysteresis characteristics are the main reason for the nonlinear characteristics of piezoe...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2021-01-01
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| Series: | Complexity |
| Online Access: | http://dx.doi.org/10.1155/2021/5537998 |
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