Inline Mapping of Amorphous Silicon Layer Thickness of Heterojunction Precursors Using Multispectral Imaging
In this paper, we present an inline characterization technique to determine spatially resolved thickness maps of ultra-thin layers on textured silicon substrates. The technique is based on multispectral imaging and optical modelling of discrete spectral reflectance data using rigorous polarization...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
TIB Open Publishing
2025-01-01
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| Series: | SiliconPV Conference Proceedings |
| Subjects: | |
| Online Access: | https://www.tib-op.org/ojs/index.php/siliconpv/article/view/1324 |
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