Low Loss CMOS-Compatible PECVD Silicon Nitride Waveguides and Grating Couplers for Blue Light Optogenetic Applications
This paper presents silicon nitride (Si<sub>x</sub>N<sub>y</sub>) photonic integrated circuits (PICs) with high performance at a wavelength of 450 nm, which, therefore, is suitable for neuronal stimulation with optogenetics. These PICs consist of straight and bent...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7547949/ |
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