THE OPTIMIZATION OF OVAL VARIABLE CROSS-SECTION BEAM IN MEMS
MEMS device structure plays an important role on the performance of the sensor. To improve its stability, oval variable beam is selected to decrease stress concentration and widen the gap between the non-detection directional stiffness and detection directional stiffness, thereby reducing cross sens...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Journal of Mechanical Strength
2019-01-01
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| Series: | Jixie qiangdu |
| Subjects: | |
| Online Access: | http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2019.04.017 |
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