Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias
This paper investigates the nonlinear response of microelectromechanical system (MEMS) cantilever resonator electrostatically actuated by applying a soft alternating current (AC) voltage and an even softer direct current (DC) voltage between the resonators and a parallel fixed ground plate. The AC f...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2014-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2014/542023 |
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