Characterization of the Microstructural and Mechanical Properties of MoZrN Coating
The aim of this paper is evaluation of properties of samples with The ternary nitride (Mo,Zr)N thin films were grown on silicon and steel XC100 substrates by the reactive RF magnetron sputtering technique. The substrates were exposed to ion bombardmen coating, which was deposited on two types of su...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2017-02-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2017/1/articles/jnep_V9_01014.pdf |
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