Energy-dependent machining mechanism and process in water-jet guided laser processing single crystal diamond

Water-Jet Guided Laser (WJGL) machining is an outstanding technique for efficiently and flexibly machining single crystal diamond components. However, the machining mechanism and process are still indistinct. In this work, critical laser condition for material removal was proposed. Critical laser fl...

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Main Authors: Shilong Chen, Tianye Jin, Zihao Lin, Mingtao Wu, Junquan Huang, Junyun Chen, Anmin Nie
Format: Article
Language:English
Published: Elsevier 2025-04-01
Series:Alexandria Engineering Journal
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Online Access:http://www.sciencedirect.com/science/article/pii/S1110016825001425
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author Shilong Chen
Tianye Jin
Zihao Lin
Mingtao Wu
Junquan Huang
Junyun Chen
Anmin Nie
author_facet Shilong Chen
Tianye Jin
Zihao Lin
Mingtao Wu
Junquan Huang
Junyun Chen
Anmin Nie
author_sort Shilong Chen
collection DOAJ
description Water-Jet Guided Laser (WJGL) machining is an outstanding technique for efficiently and flexibly machining single crystal diamond components. However, the machining mechanism and process are still indistinct. In this work, critical laser condition for material removal was proposed. Critical laser fluence dynamically changed from 48.3 J/cm2 to 77.5 J/cm2 for laser power of 8 W to 20 W. Subsequently, ablation mechanism was discussed in view of the microscopic morphology and surface characterization. The diamond material was incompletely softened and transited to sp2-dominated amorphous composition with partial diamond polycrystallization under low energy, when the laser power was ≤ 14 W. To the contrary, material was sufficiently softened under high energy and removed by water washing, resulting in a finished surface featuring micro breakage and sp3-dominated amorphous subsurface. At last, energy-dependent influence on machining outcomes was investigated. High-energy ablation (laser power of ≥16 W) was beneficial to promote kerf straightness, aspect ratio, material removal rate (MRR) and surface quality, owing to high-energy ablation mechanism for complete and clean material removal. Micro groove with parallel side wall and high aspect ratio (maximum of 16.7) was fabricated. The MRR reached up to 17.3 × 10−3 mm3/s, and smooth surface with roughness of Sa< 200 nm was achieved.
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publishDate 2025-04-01
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series Alexandria Engineering Journal
spelling doaj-art-bd3ab5fc4afa4f67ab712c60f2f02e702025-01-31T05:10:12ZengElsevierAlexandria Engineering Journal1110-01682025-04-01118681691Energy-dependent machining mechanism and process in water-jet guided laser processing single crystal diamondShilong Chen0Tianye Jin1Zihao Lin2Mingtao Wu3Junquan Huang4Junyun Chen5Anmin Nie6School of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, ChinaSchool of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, China; Center for High Pressure Science (CHiPS), State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao 066004, China; Corresponding authors at: School of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, China.School of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, ChinaSichuan Precision and Ultra-Precision Machining Engineering Technology Center, Chengdu 610200, ChinaCenter for High Pressure Science (CHiPS), State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao 066004, ChinaSchool of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, China; Center for High Pressure Science (CHiPS), State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao 066004, China; Corresponding authors at: School of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, China.Center for High Pressure Science (CHiPS), State Key Laboratory of Metastable Materials Science and Technology, Yanshan University, Qinhuangdao 066004, ChinaWater-Jet Guided Laser (WJGL) machining is an outstanding technique for efficiently and flexibly machining single crystal diamond components. However, the machining mechanism and process are still indistinct. In this work, critical laser condition for material removal was proposed. Critical laser fluence dynamically changed from 48.3 J/cm2 to 77.5 J/cm2 for laser power of 8 W to 20 W. Subsequently, ablation mechanism was discussed in view of the microscopic morphology and surface characterization. The diamond material was incompletely softened and transited to sp2-dominated amorphous composition with partial diamond polycrystallization under low energy, when the laser power was ≤ 14 W. To the contrary, material was sufficiently softened under high energy and removed by water washing, resulting in a finished surface featuring micro breakage and sp3-dominated amorphous subsurface. At last, energy-dependent influence on machining outcomes was investigated. High-energy ablation (laser power of ≥16 W) was beneficial to promote kerf straightness, aspect ratio, material removal rate (MRR) and surface quality, owing to high-energy ablation mechanism for complete and clean material removal. Micro groove with parallel side wall and high aspect ratio (maximum of 16.7) was fabricated. The MRR reached up to 17.3 × 10−3 mm3/s, and smooth surface with roughness of Sa< 200 nm was achieved.http://www.sciencedirect.com/science/article/pii/S1110016825001425Water-jet guided laserSingle crystal diamondCritical laser fluenceSurface ablation
spellingShingle Shilong Chen
Tianye Jin
Zihao Lin
Mingtao Wu
Junquan Huang
Junyun Chen
Anmin Nie
Energy-dependent machining mechanism and process in water-jet guided laser processing single crystal diamond
Alexandria Engineering Journal
Water-jet guided laser
Single crystal diamond
Critical laser fluence
Surface ablation
title Energy-dependent machining mechanism and process in water-jet guided laser processing single crystal diamond
title_full Energy-dependent machining mechanism and process in water-jet guided laser processing single crystal diamond
title_fullStr Energy-dependent machining mechanism and process in water-jet guided laser processing single crystal diamond
title_full_unstemmed Energy-dependent machining mechanism and process in water-jet guided laser processing single crystal diamond
title_short Energy-dependent machining mechanism and process in water-jet guided laser processing single crystal diamond
title_sort energy dependent machining mechanism and process in water jet guided laser processing single crystal diamond
topic Water-jet guided laser
Single crystal diamond
Critical laser fluence
Surface ablation
url http://www.sciencedirect.com/science/article/pii/S1110016825001425
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AT mingtaowu energydependentmachiningmechanismandprocessinwaterjetguidedlaserprocessingsinglecrystaldiamond
AT junquanhuang energydependentmachiningmechanismandprocessinwaterjetguidedlaserprocessingsinglecrystaldiamond
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AT anminnie energydependentmachiningmechanismandprocessinwaterjetguidedlaserprocessingsinglecrystaldiamond