Growth and characterization of aluminum nitride (AlN) thin film on steel using reactive sputtering deposition
In this study, aluminum nitrid (AlN) thin films were deposited on steel using reactive sputtering physical vapour deposition (PVD). The aim was to develop an AlN-coated steel surface and assess its tribological and mechanical behavior. X-ray diffraction results confirmed the formation of the AlN thi...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/adec43 |
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