The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications
The electrical characteristics of aluminum (Al) doped zinc oxide (ZnO) thin film for high sensitivity humidity sensors are presented. The effects of Al doping concentration at 0∼0.6 at % on the Al doped ZnO thin film properties were investigated using current-voltage measurement. The optical and str...
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Wiley
2011-01-01
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Series: | Advances in Materials Science and Engineering |
Online Access: | http://dx.doi.org/10.1155/2011/974906 |
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author | N. D. Md Sin M. Fuad Kamel Rosalena Irma Alip Zulfakri Mohamad M. Rusop |
author_facet | N. D. Md Sin M. Fuad Kamel Rosalena Irma Alip Zulfakri Mohamad M. Rusop |
author_sort | N. D. Md Sin |
collection | DOAJ |
description | The electrical characteristics of aluminum (Al) doped zinc oxide (ZnO) thin film for high sensitivity humidity sensors are presented. The effects of Al doping concentration at 0∼0.6 at % on the Al doped ZnO thin film properties were investigated using current-voltage measurement. The optical and structural properties were characterized using photoluminescence (PL), scanning emission microscope (SEM), and X-ray diffraction (XRD). Parameter 0.6 at % Aluminum doped show high sensitivity and suitable for humidity sensor. PL show an emissions band with two peaks centered at about 380 nm (ultra-violet (UV)) and 600 nm (green) in a room temperature. The length of the nanorods increases as the doping concentration increases. XRD results show the intensity of the (002) peak decreased with the increasing of doping concentration. |
format | Article |
id | doaj-art-b8e6477515c54e2ca2e2b0978816923b |
institution | Kabale University |
issn | 1687-8434 1687-8442 |
language | English |
publishDate | 2011-01-01 |
publisher | Wiley |
record_format | Article |
series | Advances in Materials Science and Engineering |
spelling | doaj-art-b8e6477515c54e2ca2e2b0978816923b2025-02-03T01:00:52ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422011-01-01201110.1155/2011/974906974906The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor ApplicationsN. D. Md Sin0M. Fuad Kamel1Rosalena Irma Alip2Zulfakri Mohamad3M. Rusop4Nano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaNano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaNano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaNano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaNano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaThe electrical characteristics of aluminum (Al) doped zinc oxide (ZnO) thin film for high sensitivity humidity sensors are presented. The effects of Al doping concentration at 0∼0.6 at % on the Al doped ZnO thin film properties were investigated using current-voltage measurement. The optical and structural properties were characterized using photoluminescence (PL), scanning emission microscope (SEM), and X-ray diffraction (XRD). Parameter 0.6 at % Aluminum doped show high sensitivity and suitable for humidity sensor. PL show an emissions band with two peaks centered at about 380 nm (ultra-violet (UV)) and 600 nm (green) in a room temperature. The length of the nanorods increases as the doping concentration increases. XRD results show the intensity of the (002) peak decreased with the increasing of doping concentration.http://dx.doi.org/10.1155/2011/974906 |
spellingShingle | N. D. Md Sin M. Fuad Kamel Rosalena Irma Alip Zulfakri Mohamad M. Rusop The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications Advances in Materials Science and Engineering |
title | The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications |
title_full | The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications |
title_fullStr | The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications |
title_full_unstemmed | The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications |
title_short | The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications |
title_sort | electrical characteristics of aluminium doped zinc oxide thin film for humidity sensor applications |
url | http://dx.doi.org/10.1155/2011/974906 |
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