The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications

The electrical characteristics of aluminum (Al) doped zinc oxide (ZnO) thin film for high sensitivity humidity sensors are presented. The effects of Al doping concentration at 0∼0.6 at % on the Al doped ZnO thin film properties were investigated using current-voltage measurement. The optical and str...

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Main Authors: N. D. Md Sin, M. Fuad Kamel, Rosalena Irma Alip, Zulfakri Mohamad, M. Rusop
Format: Article
Language:English
Published: Wiley 2011-01-01
Series:Advances in Materials Science and Engineering
Online Access:http://dx.doi.org/10.1155/2011/974906
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author N. D. Md Sin
M. Fuad Kamel
Rosalena Irma Alip
Zulfakri Mohamad
M. Rusop
author_facet N. D. Md Sin
M. Fuad Kamel
Rosalena Irma Alip
Zulfakri Mohamad
M. Rusop
author_sort N. D. Md Sin
collection DOAJ
description The electrical characteristics of aluminum (Al) doped zinc oxide (ZnO) thin film for high sensitivity humidity sensors are presented. The effects of Al doping concentration at 0∼0.6 at % on the Al doped ZnO thin film properties were investigated using current-voltage measurement. The optical and structural properties were characterized using photoluminescence (PL), scanning emission microscope (SEM), and X-ray diffraction (XRD). Parameter 0.6 at % Aluminum doped show high sensitivity and suitable for humidity sensor. PL show an emissions band with two peaks centered at about 380 nm (ultra-violet (UV)) and 600 nm (green) in a room temperature. The length of the nanorods increases as the doping concentration increases. XRD results show the intensity of the (002) peak decreased with the increasing of doping concentration.
format Article
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institution Kabale University
issn 1687-8434
1687-8442
language English
publishDate 2011-01-01
publisher Wiley
record_format Article
series Advances in Materials Science and Engineering
spelling doaj-art-b8e6477515c54e2ca2e2b0978816923b2025-02-03T01:00:52ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422011-01-01201110.1155/2011/974906974906The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor ApplicationsN. D. Md Sin0M. Fuad Kamel1Rosalena Irma Alip2Zulfakri Mohamad3M. Rusop4Nano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaNano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaNano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaNano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaNano-Electronic Centre, Faculty of Electrical Engineering, University Teknologi Mara, 40450 Shah Alam, Selangor, MalaysiaThe electrical characteristics of aluminum (Al) doped zinc oxide (ZnO) thin film for high sensitivity humidity sensors are presented. The effects of Al doping concentration at 0∼0.6 at % on the Al doped ZnO thin film properties were investigated using current-voltage measurement. The optical and structural properties were characterized using photoluminescence (PL), scanning emission microscope (SEM), and X-ray diffraction (XRD). Parameter 0.6 at % Aluminum doped show high sensitivity and suitable for humidity sensor. PL show an emissions band with two peaks centered at about 380 nm (ultra-violet (UV)) and 600 nm (green) in a room temperature. The length of the nanorods increases as the doping concentration increases. XRD results show the intensity of the (002) peak decreased with the increasing of doping concentration.http://dx.doi.org/10.1155/2011/974906
spellingShingle N. D. Md Sin
M. Fuad Kamel
Rosalena Irma Alip
Zulfakri Mohamad
M. Rusop
The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications
Advances in Materials Science and Engineering
title The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications
title_full The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications
title_fullStr The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications
title_full_unstemmed The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications
title_short The Electrical Characteristics of Aluminium Doped Zinc Oxide Thin Film for Humidity Sensor Applications
title_sort electrical characteristics of aluminium doped zinc oxide thin film for humidity sensor applications
url http://dx.doi.org/10.1155/2011/974906
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