Experimental Investigation into Vibration Characteristics for Damage Minimization in a Lapping Process
Lapping machines are used in a hard disk rough lapping process where a workpiece (a wafer row bar) is locked with a robot arm and rubbed on a lap plate. In this process, the lap plate’s condition and lifetime are among important concerned factors. The lifetime can be too short due to the plate being...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2016-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2016/4836516 |
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