Using SDPC for Visual Exploratory Analysis of Semiconductor Production Line Sensor Data

Vast amounts of data are continuously collected through sensors fitted into various pieces of equipment and processes in semiconductor production lines. These integrated datasets often encompass tens of thousands of dimensions, making it challenging to identify complex relationships among data dimen...

Full description

Saved in:
Bibliographic Details
Main Authors: Xinxiao Li, Xian-Hua Han, Yongqing Sun
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/25/7/1984
Tags: Add Tag
No Tags, Be the first to tag this record!