Effects of the Argon Pressure on the Optical Band Gap of Zinc Oxide Thin Films Grown by Nonreactive RF Sputtering

Zinc oxide (ZnO) thin films were grown by nonreactive RF sputtering at room temperature under varying argon pressures (PAr). Their optical band gap was found to increase from 3.58 to 4.34 eV when the argon pressure increases from 2.67 to 10.66 Pa. After annealing at 200°C and 500°C, optical band gap...

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Main Authors: M. Acosta, I. Riech, E. Martín-Tovar
Format: Article
Language:English
Published: Wiley 2013-01-01
Series:Advances in Condensed Matter Physics
Online Access:http://dx.doi.org/10.1155/2013/970976
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author M. Acosta
I. Riech
E. Martín-Tovar
author_facet M. Acosta
I. Riech
E. Martín-Tovar
author_sort M. Acosta
collection DOAJ
description Zinc oxide (ZnO) thin films were grown by nonreactive RF sputtering at room temperature under varying argon pressures (PAr). Their optical band gap was found to increase from 3.58 to 4.34 eV when the argon pressure increases from 2.67 to 10.66 Pa. After annealing at 200°C and 500°C, optical band gaps decrease considerably. The observed widening of the band gap with increasing PAr can be understood as being a consequence of the poorer crystallinity of films grown at higher pressures. Measurements of morphological and electrical properties of these films correlate well with this picture. Our main aim is to understand the effects of PAr on several physical properties of the films, and most importantly on its optical band gap.
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spelling doaj-art-b37ed9b6d9994682a0adaed43d92e2a42025-02-03T01:09:30ZengWileyAdvances in Condensed Matter Physics1687-81081687-81242013-01-01201310.1155/2013/970976970976Effects of the Argon Pressure on the Optical Band Gap of Zinc Oxide Thin Films Grown by Nonreactive RF SputteringM. Acosta0I. Riech1E. Martín-Tovar2Materials Science Laboratory, Faculty of Engineering, Yucatan University, Avenida Industrias No Contaminantes S/N, A.P. 150, Cordemex, 97000 Mérida, Yuc, MexicoMaterials Science Laboratory, Faculty of Engineering, Yucatan University, Avenida Industrias No Contaminantes S/N, A.P. 150, Cordemex, 97000 Mérida, Yuc, MexicoMaterials Science Laboratory, Faculty of Engineering, Yucatan University, Avenida Industrias No Contaminantes S/N, A.P. 150, Cordemex, 97000 Mérida, Yuc, MexicoZinc oxide (ZnO) thin films were grown by nonreactive RF sputtering at room temperature under varying argon pressures (PAr). Their optical band gap was found to increase from 3.58 to 4.34 eV when the argon pressure increases from 2.67 to 10.66 Pa. After annealing at 200°C and 500°C, optical band gaps decrease considerably. The observed widening of the band gap with increasing PAr can be understood as being a consequence of the poorer crystallinity of films grown at higher pressures. Measurements of morphological and electrical properties of these films correlate well with this picture. Our main aim is to understand the effects of PAr on several physical properties of the films, and most importantly on its optical band gap.http://dx.doi.org/10.1155/2013/970976
spellingShingle M. Acosta
I. Riech
E. Martín-Tovar
Effects of the Argon Pressure on the Optical Band Gap of Zinc Oxide Thin Films Grown by Nonreactive RF Sputtering
Advances in Condensed Matter Physics
title Effects of the Argon Pressure on the Optical Band Gap of Zinc Oxide Thin Films Grown by Nonreactive RF Sputtering
title_full Effects of the Argon Pressure on the Optical Band Gap of Zinc Oxide Thin Films Grown by Nonreactive RF Sputtering
title_fullStr Effects of the Argon Pressure on the Optical Band Gap of Zinc Oxide Thin Films Grown by Nonreactive RF Sputtering
title_full_unstemmed Effects of the Argon Pressure on the Optical Band Gap of Zinc Oxide Thin Films Grown by Nonreactive RF Sputtering
title_short Effects of the Argon Pressure on the Optical Band Gap of Zinc Oxide Thin Films Grown by Nonreactive RF Sputtering
title_sort effects of the argon pressure on the optical band gap of zinc oxide thin films grown by nonreactive rf sputtering
url http://dx.doi.org/10.1155/2013/970976
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