Field-Emission Study of Multi-Walled Carbon Nanotubes Grown On Si Substrate by Low Pressure Chemical Vapor Deposition
CNTs are synthesized by Low Pressure Chemical Vapor Deposition (LPCVD) method at 600 °C. The Si substrate is coated with Fe, used as a catalyst, by RF- sputtering. The thickness of the catalyst film is measured to be approximately 15 nm. Three precursor gases Acetylene (C2H2), Ammonia (NH3) and Hydr...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2011-01-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2011/1,%20Part%202/articles/jnep_2011_V3_N1(Part2)_358-361.pdf |
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