Preparation and Properties of SnO2 Film Deposited by Magnetron Sputtering

Preparation and Properties of SnO2 Film Deposited by Magnetron Sputtering

Tin oxide SnO2 films were prepared by RF magnetron sputtering. The effects of oxygen partial pressure percentage on the SnO2 property have been investigated to obtain relatively high-resistivity SnO2 films which could be used as buffer layers to optimize the performance of CdTe/CdS solar cells. The...

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Bibliographic Details
Main Authors:	Dan Leng, Lili Wu, Hongchao Jiang, Yu Zhao, Jingquan Zhang, Wei Li, Lianghuan Feng
Format:	Article
Language:	English
Published:	Wiley 2012-01-01
Series:	International Journal of Photoenergy
Online Access:	http://dx.doi.org/10.1155/2012/235971
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