Three-Level All-SiC High-Frequency High-Voltage Plasma Power Supply System

Plasma power supplies are extensively utilized in various manufacturing and medical industries. Addressing the challenges of high-voltage and high-temperature resistance in current plasma power supply systems under high-frequency conditions, this study proposes a novel design method for an all-SiC h...

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Bibliographic Details
Main Authors: Kaida Cai, Jing Xiao, Zhe Yang, Ranghao Hu
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Energies
Subjects:
Online Access:https://www.mdpi.com/1996-1073/18/7/1617
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