Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current
The results of the study of the phase composition and physical and mechanical properties of multicomponent coatings Ti– Cr–B–N formed by magnetron sputtering at a constant current from composite targets are presented. The features of phase formation of coatings when spraying targets containing titan...
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Format: | Article |
Language: | English |
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Belarusian National Technical University
2019-04-01
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Series: | Литьë и металлургия |
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Online Access: | https://lim.bntu.by/jour/article/view/2718 |
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author | S. D. Latushkina I. M. Romanov A. R. Luchenok O. I. Posylkina Yu. A. Harlan Ya. Yu. Martinkevich |
author_facet | S. D. Latushkina I. M. Romanov A. R. Luchenok O. I. Posylkina Yu. A. Harlan Ya. Yu. Martinkevich |
author_sort | S. D. Latushkina |
collection | DOAJ |
description | The results of the study of the phase composition and physical and mechanical properties of multicomponent coatings Ti– Cr–B–N formed by magnetron sputtering at a constant current from composite targets are presented. The features of phase formation of coatings when spraying targets containing titanium diboride (TiB2) or boron nitride (BN) as a boron-containing component are studied. The conditions of deposition of coatings with microhardness up to 32 GPA and heat resistance up to 800 °C are established. |
format | Article |
id | doaj-art-a5f117f73b2d42498a2da4f4491e8cbf |
institution | Kabale University |
issn | 1683-6065 2414-0406 |
language | English |
publishDate | 2019-04-01 |
publisher | Belarusian National Technical University |
record_format | Article |
series | Литьë и металлургия |
spelling | doaj-art-a5f117f73b2d42498a2da4f4491e8cbf2025-02-03T11:51:08ZengBelarusian National Technical UniversityЛитьë и металлургия1683-60652414-04062019-04-010111211810.21122/1683-6065-2019-1-112-1182686Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct currentS. D. Latushkina0I. M. Romanov1A. R. Luchenok2O. I. Posylkina3Yu. A. Harlan4Ya. Yu. Martinkevich5Physical-Engineering Institute of the NAS of BelarusPhysical-Engineering Institute of the NAS of BelarusResearch Institute of Pulse Processes with Pilot Plant, Powder Metallurgy Institute of the NAS of BelarusPhysical-Engineering Institute of the NAS of BelarusPhysical-Engineering Institute of the NAS of BelarusPhysical-Engineering Institute of the NAS of BelarusThe results of the study of the phase composition and physical and mechanical properties of multicomponent coatings Ti– Cr–B–N formed by magnetron sputtering at a constant current from composite targets are presented. The features of phase formation of coatings when spraying targets containing titanium diboride (TiB2) or boron nitride (BN) as a boron-containing component are studied. The conditions of deposition of coatings with microhardness up to 32 GPA and heat resistance up to 800 °C are established.https://lim.bntu.by/jour/article/view/2718magnetron sputteringtargetheat resistancemicrohardness |
spellingShingle | S. D. Latushkina I. M. Romanov A. R. Luchenok O. I. Posylkina Yu. A. Harlan Ya. Yu. Martinkevich Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current Литьë и металлургия magnetron sputtering target heat resistance microhardness |
title | Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current |
title_full | Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current |
title_fullStr | Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current |
title_full_unstemmed | Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current |
title_short | Technological features of Ti–Cr–B–N coatings formation by magnetron sputtering method in a direct current |
title_sort | technological features of ti cr b n coatings formation by magnetron sputtering method in a direct current |
topic | magnetron sputtering target heat resistance microhardness |
url | https://lim.bntu.by/jour/article/view/2718 |
work_keys_str_mv | AT sdlatushkina technologicalfeaturesofticrbncoatingsformationbymagnetronsputteringmethodinadirectcurrent AT imromanov technologicalfeaturesofticrbncoatingsformationbymagnetronsputteringmethodinadirectcurrent AT arluchenok technologicalfeaturesofticrbncoatingsformationbymagnetronsputteringmethodinadirectcurrent AT oiposylkina technologicalfeaturesofticrbncoatingsformationbymagnetronsputteringmethodinadirectcurrent AT yuaharlan technologicalfeaturesofticrbncoatingsformationbymagnetronsputteringmethodinadirectcurrent AT yayumartinkevich technologicalfeaturesofticrbncoatingsformationbymagnetronsputteringmethodinadirectcurrent |