Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures

Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures

The propagation of interface acoustic waves (IAWs) in 128° YX-LiNbO<sub>3</sub>/SU-8/overcoat structures was theoretically studied and experimentally investigated for different types of overcoat materials and thicknesses of the SU-8 adhesive layer. Three-dimensional finite element method...

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Bibliographic Details
Main Authors: Cinzia Caliendo, Massimiliano Benetti, Domenico Cannatà, Farouk Laidoudi, Gaetana Petrone
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Micromachines
Subjects:
IAW
piezoelectricity
LiNbO<sub>3</sub>
fused silica
silicon
Al<sub>2</sub>O<sub>3</sub>
Online Access:https://www.mdpi.com/2072-666X/16/1/99
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