Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures
The propagation of interface acoustic waves (IAWs) in 128° YX-LiNbO<sub>3</sub>/SU-8/overcoat structures was theoretically studied and experimentally investigated for different types of overcoat materials and thicknesses of the SU-8 adhesive layer. Three-dimensional finite element method...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/1/99 |
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