Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures
The propagation of interface acoustic waves (IAWs) in 128° YX-LiNbO<sub>3</sub>/SU-8/overcoat structures was theoretically studied and experimentally investigated for different types of overcoat materials and thicknesses of the SU-8 adhesive layer. Three-dimensional finite element method...
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MDPI AG
2025-01-01
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| Online Access: | https://www.mdpi.com/2072-666X/16/1/99 |
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| author | Cinzia Caliendo Massimiliano Benetti Domenico Cannatà Farouk Laidoudi Gaetana Petrone |
| author_facet | Cinzia Caliendo Massimiliano Benetti Domenico Cannatà Farouk Laidoudi Gaetana Petrone |
| author_sort | Cinzia Caliendo |
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| description | The propagation of interface acoustic waves (IAWs) in 128° YX-LiNbO<sub>3</sub>/SU-8/overcoat structures was theoretically studied and experimentally investigated for different types of overcoat materials and thicknesses of the SU-8 adhesive layer. Three-dimensional finite element method analysis was performed using Comsol Multiphysics software to design an optimized multilayer configuration able to achieve an efficient guiding effect of the IAW at the LiNbO<sub>3</sub>/overcoat interface. Numerical analysis results showed the following: (i) an overcoat faster than the piezoelectric half-space ensures that the wave propagation is confined mainly close to the surface of the LiNbO<sub>3</sub>, although with minimal scattering in the overcoat; (ii) the presence of the SU-8, in addition to performing the essential function of an adhesive layer, can also promote the trapping of the acoustic energy toward the surface of the piezoelectric substrate; and (iii) the electromechanical coupling efficiency of the IAW is very close to that of the surface acoustic wave (SAW) along the bare LiNbO<sub>3</sub> half-space. The numerical predictions were experimentally assessed for some SU-8 layer thicknesses and overcoat material types. The propagation of the IAWs was experimentally measured in LiNbO<sub>3</sub>/SU-8/fused silica, LiNbO<sub>3</sub>/SU-8/(001)Si, and LiNbO<sub>3</sub>/SU-8/c-Al<sub>2</sub>O<sub>3</sub> structures for an SU-8 layer about 15 µm thick; the velocities of the IAWs were found in good agreement with the theoretically calculated values. Although the interest in IAWs was born many years ago for packageless applications, it can currently be renewed if thought for applications in microfluidics. Indeed, the IAWs may represent a valid alternative to standing SAWs, which are strongly attenuated when travelling beneath the walls of polydimethylsiloxane (PDMS) microfluidic channels for continuous flow particle manipulation, provided that the channel is excavated into the overcoating. |
| format | Article |
| id | doaj-art-a4cb8cbf2ef14541824d4aea86049911 |
| institution | Kabale University |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-01-01 |
| publisher | MDPI AG |
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| series | Micromachines |
| spelling | doaj-art-a4cb8cbf2ef14541824d4aea860499112025-01-24T13:42:09ZengMDPI AGMicromachines2072-666X2025-01-011619910.3390/mi16010099Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat StructuresCinzia Caliendo0Massimiliano Benetti1Domenico Cannatà2Farouk Laidoudi3Gaetana Petrone4Institute for Photonics and Nanotechnologies, IFN-CNR, Via del Fosso del Cavaliere 100, 00133 Rome, ItalyInstitute for Microelectronics and Microsystems, IMM-CNR, Via del Fosso del Cavaliere 100, 00133 Rome, ItalyInstitute for Microelectronics and Microsystems, IMM-CNR, Via del Fosso del Cavaliere 100, 00133 Rome, ItalyResearch Center in Industrial Technologies CRTI, P.O. Box 64 Cheraga, Algiers 16014, AlgeriaDepartment of Astronautical, Electrical and Energy Engineering, University of Rome “La Sapienza”, Via Eudossiana 18, 00184 Rome, ItalyThe propagation of interface acoustic waves (IAWs) in 128° YX-LiNbO<sub>3</sub>/SU-8/overcoat structures was theoretically studied and experimentally investigated for different types of overcoat materials and thicknesses of the SU-8 adhesive layer. Three-dimensional finite element method analysis was performed using Comsol Multiphysics software to design an optimized multilayer configuration able to achieve an efficient guiding effect of the IAW at the LiNbO<sub>3</sub>/overcoat interface. Numerical analysis results showed the following: (i) an overcoat faster than the piezoelectric half-space ensures that the wave propagation is confined mainly close to the surface of the LiNbO<sub>3</sub>, although with minimal scattering in the overcoat; (ii) the presence of the SU-8, in addition to performing the essential function of an adhesive layer, can also promote the trapping of the acoustic energy toward the surface of the piezoelectric substrate; and (iii) the electromechanical coupling efficiency of the IAW is very close to that of the surface acoustic wave (SAW) along the bare LiNbO<sub>3</sub> half-space. The numerical predictions were experimentally assessed for some SU-8 layer thicknesses and overcoat material types. The propagation of the IAWs was experimentally measured in LiNbO<sub>3</sub>/SU-8/fused silica, LiNbO<sub>3</sub>/SU-8/(001)Si, and LiNbO<sub>3</sub>/SU-8/c-Al<sub>2</sub>O<sub>3</sub> structures for an SU-8 layer about 15 µm thick; the velocities of the IAWs were found in good agreement with the theoretically calculated values. Although the interest in IAWs was born many years ago for packageless applications, it can currently be renewed if thought for applications in microfluidics. Indeed, the IAWs may represent a valid alternative to standing SAWs, which are strongly attenuated when travelling beneath the walls of polydimethylsiloxane (PDMS) microfluidic channels for continuous flow particle manipulation, provided that the channel is excavated into the overcoating.https://www.mdpi.com/2072-666X/16/1/99IAWpiezoelectricityLiNbO<sub>3</sub>fused silicasiliconAl<sub>2</sub>O<sub>3</sub> |
| spellingShingle | Cinzia Caliendo Massimiliano Benetti Domenico Cannatà Farouk Laidoudi Gaetana Petrone Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures Micromachines IAW piezoelectricity LiNbO<sub>3</sub> fused silica silicon Al<sub>2</sub>O<sub>3</sub> |
| title | Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures |
| title_full | Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures |
| title_fullStr | Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures |
| title_full_unstemmed | Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures |
| title_short | Interface Acoustic Waves in 128° YX-LiNbO<sub>3</sub>/SU-8/Overcoat Structures |
| title_sort | interface acoustic waves in 128° yx linbo sub 3 sub su 8 overcoat structures |
| topic | IAW piezoelectricity LiNbO<sub>3</sub> fused silica silicon Al<sub>2</sub>O<sub>3</sub> |
| url | https://www.mdpi.com/2072-666X/16/1/99 |
| work_keys_str_mv | AT cinziacaliendo interfaceacousticwavesin128yxlinbosub3subsu8overcoatstructures AT massimilianobenetti interfaceacousticwavesin128yxlinbosub3subsu8overcoatstructures AT domenicocannata interfaceacousticwavesin128yxlinbosub3subsu8overcoatstructures AT farouklaidoudi interfaceacousticwavesin128yxlinbosub3subsu8overcoatstructures AT gaetanapetrone interfaceacousticwavesin128yxlinbosub3subsu8overcoatstructures |