Design and Application of Uniaxially Sensitive Stress Sensor
Current stress sensors for microsystems face integration challenges and complex signal decoding. This paper proposes a real-time uniaxially sensitive stress sensor. It is obtained by simple combinations of bar resistors using their sensitivity differences in different axes. With the aid of a Wheatst...
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| Format: | Article |
| Language: | English |
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MDPI AG
2025-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/16/1/94 |
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| author | Kaituo Wu Zixun Xiang Xinbo Lu Yichao Yan Chunyang Wu Tao Wang Wanli Zhang |
| author_facet | Kaituo Wu Zixun Xiang Xinbo Lu Yichao Yan Chunyang Wu Tao Wang Wanli Zhang |
| author_sort | Kaituo Wu |
| collection | DOAJ |
| description | Current stress sensors for microsystems face integration challenges and complex signal decoding. This paper proposes a real-time uniaxially sensitive stress sensor. It is obtained by simple combinations of bar resistors using their sensitivity differences in different axes. With the aid of a Wheatstone bridge, the sensor can measure the uniaxial stress magnitude by simple calibration of the stress against the output voltage and detect the bidirectional stress magnitude and direction in a micro-zone by simple rotation. The theoretical sensitivity obtained from simulation is 0.087 mV/V·MPa when the X-bridge is stressed in the X-direction under 1 V of excitation, and the test sensitivity of the X-bridge prepared in this paper is 0.1 mV/V·MPa. The design is structurally and procedurally simple, exhibits better temperature stability, and reduces interface requirements, making it suitable for the health monitoring of multi-chip microsystem chips. |
| format | Article |
| id | doaj-art-a0bdd779e5d747eba890574e681c32a2 |
| institution | Kabale University |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-a0bdd779e5d747eba890574e681c32a22025-01-24T13:42:08ZengMDPI AGMicromachines2072-666X2025-01-011619410.3390/mi16010094Design and Application of Uniaxially Sensitive Stress SensorKaituo Wu0Zixun Xiang1Xinbo Lu2Yichao Yan3Chunyang Wu4Tao Wang5Wanli Zhang6State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, ChinaCurrent stress sensors for microsystems face integration challenges and complex signal decoding. This paper proposes a real-time uniaxially sensitive stress sensor. It is obtained by simple combinations of bar resistors using their sensitivity differences in different axes. With the aid of a Wheatstone bridge, the sensor can measure the uniaxial stress magnitude by simple calibration of the stress against the output voltage and detect the bidirectional stress magnitude and direction in a micro-zone by simple rotation. The theoretical sensitivity obtained from simulation is 0.087 mV/V·MPa when the X-bridge is stressed in the X-direction under 1 V of excitation, and the test sensitivity of the X-bridge prepared in this paper is 0.1 mV/V·MPa. The design is structurally and procedurally simple, exhibits better temperature stability, and reduces interface requirements, making it suitable for the health monitoring of multi-chip microsystem chips.https://www.mdpi.com/2072-666X/16/1/94stress sensoruniaxial sensitiveWheatstone bridge |
| spellingShingle | Kaituo Wu Zixun Xiang Xinbo Lu Yichao Yan Chunyang Wu Tao Wang Wanli Zhang Design and Application of Uniaxially Sensitive Stress Sensor Micromachines stress sensor uniaxial sensitive Wheatstone bridge |
| title | Design and Application of Uniaxially Sensitive Stress Sensor |
| title_full | Design and Application of Uniaxially Sensitive Stress Sensor |
| title_fullStr | Design and Application of Uniaxially Sensitive Stress Sensor |
| title_full_unstemmed | Design and Application of Uniaxially Sensitive Stress Sensor |
| title_short | Design and Application of Uniaxially Sensitive Stress Sensor |
| title_sort | design and application of uniaxially sensitive stress sensor |
| topic | stress sensor uniaxial sensitive Wheatstone bridge |
| url | https://www.mdpi.com/2072-666X/16/1/94 |
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