APA (7th ed.) Citation

Ou, F., Suherman, J., Zhang, C., Wang, H., Bom, S., Davis, J. F., & Christofides, P. D. Industrial multi-machine data aggregation, AI-ready data preparation, and machine learning for virtual metrology in semiconductor wafer and slider production. Elsevier.

Chicago Style (17th ed.) Citation

Ou, Feiyang, Julius Suherman, Chao Zhang, Henrik Wang, Sthitie Bom, James F. Davis, and Panagiotis D. Christofides. Industrial Multi-machine Data Aggregation, AI-ready Data Preparation, and Machine Learning for Virtual Metrology in Semiconductor Wafer and Slider Production. Elsevier.

MLA (9th ed.) Citation

Ou, Feiyang, et al. Industrial Multi-machine Data Aggregation, AI-ready Data Preparation, and Machine Learning for Virtual Metrology in Semiconductor Wafer and Slider Production. Elsevier.