Industrial multi-machine data aggregation, AI-ready data preparation, and machine learning for virtual metrology in semiconductor wafer and slider production
Smart Manufacturing (SM), which is short for “Smart (Predictive, Preventive, Proactive) zero incident, zero emissions Manufacturing,” describes manufacturing’s digital transformation in which factories, supply chains and ecosystems are integrated, interoperable, and interconnected. Smart Manufacturi...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-06-01
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| Series: | Digital Chemical Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2772508125000262 |
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