Silicon Dioxide Functionalized with Oxygen–Containing Groups for Enhanced BCl3 Adsorption
Boron chloride in the chlorosilane is hard to remove and directly impacts the quality of polysilicon produced by improved Siemens method. Silicon dioxide functionalized with mannitol and citric acid successfully removed boron chloride in organic solution. The effects of immersion concentration and d...
Saved in:
Main Authors: | , , |
---|---|
Format: | Article |
Language: | English |
Published: |
SAGE Publishing
2023-01-01
|
Series: | Adsorption Science & Technology |
Online Access: | http://dx.doi.org/10.1155/2023/7581943 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|