Experimental characterization at nanoscale of single crystal silicon fracture toughness

The work reviews some preliminary recent micromechanical tests aimed at the evaluation of the fracture toughness of silicon. Pre-cracked nano specimens and alternatively notched nano specimens combined with the theory of critical distances (TCD) are compared. The results show that the fracture tough...

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Bibliographic Details
Main Authors: Pasquale Gallo, Takashi Sumigawa, Takayuki Kitamura
Format: Article
Language:English
Published: Gruppo Italiano Frattura 2019-01-01
Series:Fracture and Structural Integrity
Subjects:
Online Access:http://www.gruppofrattura.it/pdf/rivista/numero47/numero_47_art_31.pdf
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