Metrology of metasurfaces: optical properties
Abstract Optical Metasurfaces (MSs), a new class of planar optical elements, are profoundly disrupting the field of optical design, notably due to their compactness, multi-functionalities, and device integrability. Relying on planar nanofabrication processes closely akin to the semiconductor industr...
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2025-01-01
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| Series: | npj Nanophotonics |
| Online Access: | https://doi.org/10.1038/s44310-024-00051-4 |
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| author | Nicolas Kossowski Yanel Tahmi Amir Loucif Martin Lepers Benoit Wattellier Guillaume Vienne Samira Khadir Patrice Genevet |
| author_facet | Nicolas Kossowski Yanel Tahmi Amir Loucif Martin Lepers Benoit Wattellier Guillaume Vienne Samira Khadir Patrice Genevet |
| author_sort | Nicolas Kossowski |
| collection | DOAJ |
| description | Abstract Optical Metasurfaces (MSs), a new class of planar optical elements, are profoundly disrupting the field of optical design, notably due to their compactness, multi-functionalities, and device integrability. Relying on planar nanofabrication processes closely akin to the semiconductor industry, metasurface technology could benefit from cost-effective and potentially large-scale fabrication techniques forthwith. However, manufacturing metasurfaces with higher levels of complexity in foundries, and assembling them in production lines, still requires comprehensive optical metrology solutions, associated with established standardized measurements, that can validate their functionalities during and after integration into a system. Here, we first review the existing optical metrology techniques previously used for metasurface inspection, including intensity, polarization, quantitative phase measurements, and ptychographic imaging. We finally discuss new perspectives and exciting trends in metasurface designs, trying to identify the disruptive roles they could play in endowing next-generation metrology systems with improved performance and enhanced measurement functionalities. |
| format | Article |
| id | doaj-art-8a0ceb92d80c4ce290a124edf514dd8f |
| institution | Kabale University |
| issn | 2948-216X |
| language | English |
| publishDate | 2025-01-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | npj Nanophotonics |
| spelling | doaj-art-8a0ceb92d80c4ce290a124edf514dd8f2025-02-02T12:27:59ZengNature Portfolionpj Nanophotonics2948-216X2025-01-012111610.1038/s44310-024-00051-4Metrology of metasurfaces: optical propertiesNicolas Kossowski0Yanel Tahmi1Amir Loucif2Martin Lepers3Benoit Wattellier4Guillaume Vienne5Samira Khadir6Patrice Genevet7Université Côte d’Azur, CNRS, CRHEAUniversité Côte d’Azur, CNRS, CRHEAUniversité Côte d’Azur, CNRS, CRHEAUniversité Côte d’Azur, CNRS, CRHEAPhasicsUnity Semiconductor (Merck affiliate)Université Côte d’Azur, CNRS, CRHEAUniversité Côte d’Azur, CNRS, CRHEAAbstract Optical Metasurfaces (MSs), a new class of planar optical elements, are profoundly disrupting the field of optical design, notably due to their compactness, multi-functionalities, and device integrability. Relying on planar nanofabrication processes closely akin to the semiconductor industry, metasurface technology could benefit from cost-effective and potentially large-scale fabrication techniques forthwith. However, manufacturing metasurfaces with higher levels of complexity in foundries, and assembling them in production lines, still requires comprehensive optical metrology solutions, associated with established standardized measurements, that can validate their functionalities during and after integration into a system. Here, we first review the existing optical metrology techniques previously used for metasurface inspection, including intensity, polarization, quantitative phase measurements, and ptychographic imaging. We finally discuss new perspectives and exciting trends in metasurface designs, trying to identify the disruptive roles they could play in endowing next-generation metrology systems with improved performance and enhanced measurement functionalities.https://doi.org/10.1038/s44310-024-00051-4 |
| spellingShingle | Nicolas Kossowski Yanel Tahmi Amir Loucif Martin Lepers Benoit Wattellier Guillaume Vienne Samira Khadir Patrice Genevet Metrology of metasurfaces: optical properties npj Nanophotonics |
| title | Metrology of metasurfaces: optical properties |
| title_full | Metrology of metasurfaces: optical properties |
| title_fullStr | Metrology of metasurfaces: optical properties |
| title_full_unstemmed | Metrology of metasurfaces: optical properties |
| title_short | Metrology of metasurfaces: optical properties |
| title_sort | metrology of metasurfaces optical properties |
| url | https://doi.org/10.1038/s44310-024-00051-4 |
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