Hall‐effect sensors based on AlGaN/GaN heterojunctions on Si substrates for a wide temperature range

Abstract The authors report experimental investigations on Hall sensors based on AlGaN/GaN heterojunctions grown on silicon 111 (Si 111) substrates. Realisation of two‐dimensional electron gas‐based Hall sensors on Si substrates can have the advantages of low cost and integrability with complementar...

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Main Authors: Sagnik Kumar, R. Muralidharan, G. Narayanan
Format: Article
Language:English
Published: Wiley 2021-11-01
Series:IET Circuits, Devices and Systems
Online Access:https://doi.org/10.1049/cds2.12067
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author Sagnik Kumar
R. Muralidharan
G. Narayanan
author_facet Sagnik Kumar
R. Muralidharan
G. Narayanan
author_sort Sagnik Kumar
collection DOAJ
description Abstract The authors report experimental investigations on Hall sensors based on AlGaN/GaN heterojunctions grown on silicon 111 (Si 111) substrates. Realisation of two‐dimensional electron gas‐based Hall sensors on Si substrates can have the advantages of low cost and integrability with complementary metal‐oxide semiconductor circuits. Design and fabrication of such Hall sensors and their characterisation over a wide temperature range of 75 to 500 K are reported. The authors experimentally investigate the temperature dependence of the transresistances, sheet resistance and current‐related sensitivity (or gain) of such Hall sensors. The current‐related sensitivity is shown to be reasonably constant over the complete temperature range and certain inevitable variations in current‐related sensitivity can easily be compensated. The temperature dependence of the transresistance can be used for such compensation. The variation of the geometrical correction factor of the Hall sensor with the applied magnetic field strength and the operating temperature is also studied. The authors also demonstrate the possibility of realising Hall sensors with a high geometrical correction factor ( ≈0.97), which is practically insensitive to variations in temperature ( ≃2% from 75 to 500 K) and applied magnetic field, for applications such as in electromechanical devices.
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spelling doaj-art-89fc3bf64cf34197ab352efcff2ab0c02025-02-03T06:47:11ZengWileyIET Circuits, Devices and Systems1751-858X1751-85982021-11-0115877278610.1049/cds2.12067Hall‐effect sensors based on AlGaN/GaN heterojunctions on Si substrates for a wide temperature rangeSagnik Kumar0R. Muralidharan1G. Narayanan2Department of Electrical Engineering Indian Institute of Science Bengaluru IndiaCentre for Nano Science and Engineering Indian Institute of Science Bengaluru IndiaDepartment of Electrical Engineering Indian Institute of Science Bengaluru IndiaAbstract The authors report experimental investigations on Hall sensors based on AlGaN/GaN heterojunctions grown on silicon 111 (Si 111) substrates. Realisation of two‐dimensional electron gas‐based Hall sensors on Si substrates can have the advantages of low cost and integrability with complementary metal‐oxide semiconductor circuits. Design and fabrication of such Hall sensors and their characterisation over a wide temperature range of 75 to 500 K are reported. The authors experimentally investigate the temperature dependence of the transresistances, sheet resistance and current‐related sensitivity (or gain) of such Hall sensors. The current‐related sensitivity is shown to be reasonably constant over the complete temperature range and certain inevitable variations in current‐related sensitivity can easily be compensated. The temperature dependence of the transresistance can be used for such compensation. The variation of the geometrical correction factor of the Hall sensor with the applied magnetic field strength and the operating temperature is also studied. The authors also demonstrate the possibility of realising Hall sensors with a high geometrical correction factor ( ≈0.97), which is practically insensitive to variations in temperature ( ≃2% from 75 to 500 K) and applied magnetic field, for applications such as in electromechanical devices.https://doi.org/10.1049/cds2.12067
spellingShingle Sagnik Kumar
R. Muralidharan
G. Narayanan
Hall‐effect sensors based on AlGaN/GaN heterojunctions on Si substrates for a wide temperature range
IET Circuits, Devices and Systems
title Hall‐effect sensors based on AlGaN/GaN heterojunctions on Si substrates for a wide temperature range
title_full Hall‐effect sensors based on AlGaN/GaN heterojunctions on Si substrates for a wide temperature range
title_fullStr Hall‐effect sensors based on AlGaN/GaN heterojunctions on Si substrates for a wide temperature range
title_full_unstemmed Hall‐effect sensors based on AlGaN/GaN heterojunctions on Si substrates for a wide temperature range
title_short Hall‐effect sensors based on AlGaN/GaN heterojunctions on Si substrates for a wide temperature range
title_sort hall effect sensors based on algan gan heterojunctions on si substrates for a wide temperature range
url https://doi.org/10.1049/cds2.12067
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AT rmuralidharan halleffectsensorsbasedonalganganheterojunctionsonsisubstratesforawidetemperaturerange
AT gnarayanan halleffectsensorsbasedonalganganheterojunctionsonsisubstratesforawidetemperaturerange