High-performance 2D electronic devices enabled by strong and tough two-dimensional polymer with ultra-low dielectric constant

High-performance 2D electronic devices enabled by strong and tough two-dimensional polymer with ultra-low dielectric constant

Abstract As the feature size of microelectronic circuits is scaling down to nanometer order, the increasing interconnect crosstalk, resistance-capacitance (RC) delay and power consumption can limit the chip performance and reliability. To address these challenges, new low-k dielectric (k < 2) mat...

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Main Authors: Qiyi Fang, Kongyang Yi, Tianshu Zhai, Shisong Luo, Chen-yang Lin, Qing Ai, Yifan Zhu, Boyu Zhang, Gustavo A. Alvarez, Yanjie Shao, Haolei Zhou, Guanhui Gao, Yifeng Liu, Rui Xu, Xiang Zhang, Yuzhe Wang, Xiaoyin Tian, Honghu Zhang, Yimo Han, Hanyu Zhu, Yuji Zhao, Zhiting Tian, Yu Zhong, Zheng Liu, Jun Lou
Format: Article
Language:English
Published: Nature Portfolio 2024-12-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-024-53935-6
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https://doi.org/10.1038/s41467-024-53935-6

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