Design and Analysis of High-Precision Workbench with Large Stroke and Heavy Load for Fabricating Large-Area Grating
When scanning beam interference lithography (SBIL) technology is used for grating fabrication, the stroke, bearing capacity, and accuracy of the workbench determine the size and accuracy of the grating. For large-area gratings with dimensions exceeding the meter level, the existing workbench cannot...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-04-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/12/5/414 |
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